[labnetwork] Gas cabinets for Ammonia and 2-5% Silane

[Collins, Deon]

Holonyak Lab just completed a purchase from Critical Systems Inc. We had several older CSI cabinets refurbished as well as bought a couple new cabinets from CSI. Their customer serve has always been great, and I have most of the techs on speed dial. We have 9 pieces of their equipment. 

DEON D. COLLINS

FACILITY MANAGER
The Grainger College Of Engineering UIUC
Holonyak Micro & Nanotechnology Lab
208 N Wright St Rm. 1114 | MC-249
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu

 


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-----Original Message-----
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Kevin M McPeak
Sent: Tuesday, November 21, 2023 4:54 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Gas cabinets for Ammonia and 2-5% Silane

Dear Colleagues,

The LSU Nanofab will install an Oxford PECVD system for SiO2, SiNx, and a-Si deposition next year. We are getting quotes for ammonia and silane gas cabinets in preparation for the PECVD.

So far, we have received quotes for Ammonia and Silane gas cabinets from SDC, SilPac, Matherson, AirGas, and Critical Systems.

Are we missing anyone? We have discussed the details of the installation with our local safety folk but input from the list of recommended gas cabinet manufacturers would be most appreciated. We are especially interested in reconditioned systems if they exist. Thanks!

Regards,
Kevin

--
Kevin M. McPeak
Associate Professor | LSU Dept. of Chemical Engineering
225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication _______________________________________________
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