[labnetwork] Gas cabinets for Ammonia and 2-5% Silane

[Iulian Codreanu]

Hi Kevin,

I've purchased gas cabinets from Applied Energy system for the past 16 
years. They have both SEMI grade cabinets and more affordable ones but I 
am not sure they supply refurbished units.

Some contact emails are listed below:
Greg Havrilla <ghavrilla at appliedenergysystems.com> 
<mailto:ghavrilla at appliedenergysystems.com>
Todd Bell <tbell at appliedenergysystems.com>
Steve Buerkel <sbuerkel at appliedenergysystems.com>

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
https://udnf.udel.edu

On 11/21/2023 5:54 PM, Kevin M McPeak wrote:
> Dear Colleagues,
>
> The LSU Nanofab will install an Oxford PECVD system for SiO2, SiNx, and a-Si deposition next year. We are getting quotes for ammonia and silane gas cabinets in preparation for the PECVD.
>
> So far, we have received quotes for Ammonia and Silane gas cabinets from SDC, SilPac, Matherson, AirGas, and Critical Systems.
>
> Are we missing anyone? We have discussed the details of the installation with our local safety folk but input from the list of recommended gas cabinet manufacturers would be most appreciated. We are especially interested in reconditioned systems if they exist. Thanks!
>
> Regards,
> Kevin
>
> --
> Kevin M. McPeak
> Associate Professor | LSU Dept. of Chemical Engineering
> 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication
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