[labnetwork] Gas cabinets for Ammonia and 2-5% Silane

[James C. Sturm]

I can vouch for Applied Energy Systems (Steve Buerkel's company).  I've been working with Steve on and off for 25 years, both as lab director an in my own CVD lab.  All first rate.
Jim Sturm

********************************************
Prof. James C. Sturm
     Chair, Department of Electrical and Computer Engineering
     Stephen R. Forrest Professor in Electrical Engineering
     Princeton University
     B210 E-Quad, Olden St.
     Princeton, NJ  08540
     609-258-5610, fax:  609-258-1177
     sturm at princeton.edu




-----Original Message-----
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of LaFleur, David W
Sent: Wednesday, November 22, 2023 9:08 AM
To: Kevin M McPeak <kmcpeak at lsu.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Gas cabinets for Ammonia and 2-5% Silane

Hi Kevin,

Here at Harvard we have Applied Energy for all our toxic gasses. We are happy with their performance and support.

Regards,

David LaFleur
Equipment Engineer
CNS, Harvard University
11 Oxford St.
Cambridge, Ma. 02138






On 11/22/23, 8:15 AM, "labnetwork on behalf of Kevin M McPeak" <labnetwork-bounces at mtl.mit.edu on behalf of kmcpeak at lsu.edu> wrote:

    Dear Colleagues,

    The LSU Nanofab will install an Oxford PECVD system for SiO2, SiNx, and a-Si deposition next year. We are getting quotes for ammonia and silane gas cabinets in preparation for the PECVD.

    So far, we have received quotes for Ammonia and Silane gas cabinets from SDC, SilPac, Matherson, AirGas, and Critical Systems.

    Are we missing anyone? We have discussed the details of the installation with our local safety folk but input from the list of recommended gas cabinet manufacturers would be most appreciated. We are especially interested in reconditioned systems if they exist. Thanks!

    Regards,
    Kevin

    --
    Kevin M. McPeak
    Associate Professor | LSU Dept. of Chemical Engineering
    225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication
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