[labnetwork] Reliable Hot Plates (for baking resist)?

[Massey, Travis]

Hi Grant,

+1 for CEE hot plates for wafer bakes.  We've been running them for many years without issues.  Once the embedded computer for the attached spinner died, but CEE was responsive in getting it sorted out quickly.

Common Corning hot plates are designed for heating beakers of liquid, not wafers, so the uniformity and control/accuracy is terrible.

Best,
Travis Massey
Lawrence Livermore National Laboratory

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Randall Parker
Sent: Wednesday, October 18, 2023 3:26 PM
To: Grant Shao <shaog at stanford.edu>; Labnetwork (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Reliable Hot Plates (for baking resist)?

Hello Grant,
We have been using Apogee 300 bake plates from Cost Effective Equipment (CEE), which is an equipment company which spun out of Brewer Science. We have found their tooling to be very reliable and easy to use. Customer service has also been great. Our hot plates are integrated into a 4-station spin bench, but I believe the hot plate unit is the same as the standalone model. We use ours for polyimide soft bakes.
Bake Plates - Hot Plates - Bake Smarter - Cost Effective Equipment<https://urldefense.us/v3/__https:/www.costeffectiveequipment.com/products/bake-plates/__;!!G2kpM7uM-TzIFchu!3IEzui9LSx-bCXS-5GYkHlOwB1tT4nAtceifqyZ8g9yfHcQOGi-y2Oit4FkIrN5UmA2tm6zEnyZM_nzSW6SCwA$>

Hope this helps.

Randy Parker
Sr. Process Engineer
American Semiconductor, Inc.<https://urldefense.us/v3/__https:/americansemi.com__;!!G2kpM7uM-TzIFchu!3IEzui9LSx-bCXS-5GYkHlOwB1tT4nAtceifqyZ8g9yfHcQOGi-y2Oit4FkIrN5UmA2tm6zEnyZM_ny1_sdmuw$>
208-336-2773, ext 23

All content and attachments are ASI confidential and proprietary.

From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Grant Shao
Sent: Wednesday, October 18, 2023 1:20 PM
To: Labnetwork (labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>) <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] Reliable Hot Plates (for baking resist)?

Hello Labnetwork,

A couple of our hot plates are failing/unreliable, and before we ordered new ones, I wanted to ask if anyone has recommendations on some reliable and stable hot plates, primarily being used for baking resist.

We have a few other Corning hot plates for heated chemical work, though those are typically in use with a thermocouple sensor plugged in.

Thanks,
Grant

--
Grant Shao
Lab Operations Engineer
Nanopatterning Cleanroom<https://urldefense.us/v3/__https:/snsf.stanford.edu/facilities/fab/npc__;!!G2kpM7uM-TzIFchu!3IEzui9LSx-bCXS-5GYkHlOwB1tT4nAtceifqyZ8g9yfHcQOGi-y2Oit4FkIrN5UmA2tm6zEnyZM_nxTV1Ow0A$>, Stanford Nano Shared Facilities<https://urldefense.us/v3/__http:/snsf.stanford.edu/__;!!G2kpM7uM-TzIFchu!3IEzui9LSx-bCXS-5GYkHlOwB1tT4nAtceifqyZ8g9yfHcQOGi-y2Oit4FkIrN5UmA2tm6zEnyZM_nykH154Vw$>

shaog at stanford.edu<mailto:shaog at stanford.edu> | 650.441.9042
Spilker Building, Room 004
348 Via Pueblo
Stanford, CA 94305-4088

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20231019/fc36532d/attachment.html>