[labnetwork] Your favorite wafer bonder

[Peter Lomax]

Hi,

We have a circa 20 year old Karl Suss anodic bonder, which can also do fusion bonding.  Generally works well, doesn't have any alignment capability but has some tooling so you can align in a Karl Suss mask aligner then transfer to the bonder.

If I could improve it I would make it easier for doing stacks of three wafers - this is an option for Karl Suss but expensive - we can sort of get round it with conducting copper tape.

Support has been OK but seems to need something almost every time it is used!  Over the ast year has probably been used 20 times and just on the one project.

Cheers

Peter

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Macdonald, Robert (GE Aerospace, US)
Sent: 01 September 2023 19:24
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Your favorite wafer bonder

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Wafer bonding has advanced a great deal in the last twenty years. Industrial tools have incorporated many improvements in wafer handing and process capabilities.

But many of the bonders I encounter in University labs have not incorporated all those improvements.

I am wondering: What wafer bonder are you using in your facility? What vintage is it? How much use does it get? What types of bonds are you supporting (anodic, fusion, frit, polymer, etc)? What improvements to these tools would you like to see?

Thanks,

Rob

Robert MacDonald
MEMS Engineer
GE Research
1 Research Circle
Niskayuna, NY 12309
518 312-5646
Robert.macdonald at ge.com<mailto:Robert.macdonald at ge.com>

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