[labnetwork] fiji G2 Loading

[Jun Li, Mr]

HI Peter,

We have a new Fiji ALD system, we have not seen this problem so far.  Just one piece recommendation from the person who did installation on site, mentioned that: periodically may need grease the load/unload transfer part. though it may not directly relate to your problem.

Best
Jun

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Peter Lomax
Sent: Wednesday, September 13, 2023 3:56 AM
To: Bas van Asten <B.vanAsten at tudelft.nl>; Fab Network <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] fiji G2 Loading

Dear B. and Frank,

Thank you both for your reply, I think what we are seeing is the same as this:

https://snfexfab.stanford.edu/guide/docs/operating-instructions/fiji12and3-loading-and-unloading-videos

in the final video from Stanford.  Seems to be happening very frequently though- (every few loads), and the video shows what happens but no solution.

Best regards

Peter


Dr Peter Lomax,
Principal Experimental Officer, The School of Engineering, The University of Edinburgh,
Scottish Microelectronics Centre,
Alexander Crum Brown Road, Edinburgh, EH9 3FF
Phone:  +44 (0) 131 650 7146
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From: Bas van Asten <B.vanAsten at tudelft.nl<mailto:B.vanAsten at tudelft.nl>>
Sent: 13 September 2023 08:12
To: Peter Lomax <Peter.Lomax at ed.ac.uk<mailto:Peter.Lomax at ed.ac.uk>>; Fab Network <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: RE: fiji G2 Loading

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Dear Peter,

Yes, we have a Fiji G2 system with automatic hline loader.
We have problems loading the system every once in a while.
It's important to make sure the operators check that the sample plate is touching the prong base completely before loading.
If else over time it can move further and further out.

Best regards,



B. van Asten
Process Engineer

TU Delft
Faculty Applied Sciences
Lorentzweg 1
2628 CJ Delft
T +31 6 424 81091
E B.vanAsten at tudelft.nl<mailto:B.vanAsten at tudelft.nl>

Available on weekdays


From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Peter Lomax
Sent: Tuesday, September 12, 2023 5:57 PM
To: Fab Network <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] fiji G2 Loading

Hello all,

Has anybody got a Fiji G2 ALD, if so have you had any issues with the loading system.

Cheers

Peter



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