[labnetwork] 200mm Bulk Silicon Etch Process Needed
Randall Parker
rparker at americansemi.com
Thu Sep 14 12:40:35 EDT 2023
We have a need to etch a thin layer of silicon off of 200mm wafers. The silicon layer is freshly ground and unpatterned. Etch needs to have sufficient oxide selectivity to stop within a buried oxide layer which is 0.2-1.0um thick. Entire silicon layer needs to be removed (ex. no edge exclusion due to clamping ring).
Requested etch is similar to removing a 10um device silicon layer off an SOI wafer and stopping in BOX layer...
Open to wet or dry etch methods. If wet, single-sided processing is preferred to prevent etching back of wafer, but a tank etch is acceptable if a viable option exists.
Can anyone point me towards a service or lab facility that could perform this etch in low volumes (10-12 wafers/month)?
Thanks for your input.
Randy Parker
Sr. Process Engineer
American Semiconductor, Inc.
208-336-2773, ext 23
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