[labnetwork] Wafer Bond Alingment
Katharine Beach
beach at umich.edu
Wed Sep 13 08:47:40 EDT 2023
Following up on the bonding question from a few weeks ago. Does anyone have
an alignment/bonding system that they would recommend, and/or would willing
provide feedback on? We have been looking at the Suss, EVG and AML systems.
Thanks,
Katharine Beach
--
Katharine Beach
Research Engineer
Lurie Nanofabrication Facility
University of Michigan
beach at umich.edu <vpray at umich.edu>
(734) 255-9487 <7347638105>
Calendly <https://calendly.com/beachlnf>
1301 Beal Avenue, 1241 EECS Building
Ann Arbor, MI 48109-2122
LNF.umich.edu <http://www.lnf.umich.edu/>
<https://www.facebook.com/LurieNanofab>
<https://twitter.com/LurieNanoFab>
<https://www.linkedin.com/company/lurie-nanofabrication-facility>
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