[labnetwork] Turbo pump PlasmaTherm 720 etcher

[Johnson, Michael W]

There are probably others but you can try
provac.com

They rebuild.
________________________________
From: Johnson, Michael W <mjohnso6 at tulane.edu>
Sent: Monday, February 5, 2024 10:45 AM
To: Roman Akhmechet <romana at princeton.edu>; labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: Turbo pump PlasmaTherm 720 etcher

I don't have experience with that exact turbo.

Does the current ramp when trying to start?

If no, I suspect a bad controller. If yes and no rotation, no increase in reported speed, maybe a stuck or crashed rotor in the pump.

-M.



________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Roman Akhmechet <romana at princeton.edu>
Sent: Monday, February 5, 2024 8:07 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher


External Sender. Be aware of links, attachments and requests.

Hello,

Recently our Leybold turbo pump on an old PlasmaTherm 720 RIE tool has stopped spinning. The controller for the pump seems to be communicating, but the load stays low when trying to start the pump for about 10 minutes before going into failure, probably due to a time out. I’m wondering if anyone has a recommended vendor to repair turbo pumps, or advice on what other issue may be causing this. Thank you.



Roman Akhmechet

Princeton University
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20240205/b9907e0a/attachment.html>