[labnetwork] Turbo pump PlasmaTherm 720 etcher

[Mark Weiler]

Hi Roman…

You can reach out to Scott…

Scott Crabtree
UHV Tech Services Inc.
603-284-6306
www.UHVTS.com <http://www.uhvts.com/>

 <http://uhvts.com/> <https://uhvts.com/repair/calibration/> <https://customer.a2la.org/index.cfm?event=directory.detail&labPID=BBC11B8E-657F-4C98-A238-D3496583982B>



Best,
Mark



;Mark Weiler
Manager, Equipment & Facilities
Bertucci Nanotechnology Laboratory
Eden Hall Nanofabrication Cleanroom
Carnegie Mellon University
P:	412-268-2471
F:	412-268-3497
http://www.nanofab.ece.cmu.edu




...“If we have to have a choice between being dead and pitied, and being alive with a bad image, we’d rather be alive and have the bad image.” — Golda Meir

> On Feb 5, 2024, at 9:07 AM, Roman Akhmechet <romana at princeton.edu> wrote:
> 
> Hello,
> Recently our Leybold turbo pump on an old PlasmaTherm 720 RIE tool has stopped spinning. The controller for the pump seems to be communicating, but the load stays low when trying to start the pump for about 10 minutes before going into failure, probably due to a time out. I’m wondering if anyone has a recommended vendor to repair turbo pumps, or advice on what other issue may be causing this. Thank you.
>  
> Roman Akhmechet
> Princeton University 
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20240205/22c2c61d/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: certified-service-provider.png
Type: image/png
Size: 89530 bytes
Desc: not available
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20240205/22c2c61d/attachment.png>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: logo_iso_17025.jpeg
Type: image/jpeg
Size: 51621 bytes
Desc: not available
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20240205/22c2c61d/attachment.jpeg>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: A2LA-Accredited-Symbol_sizedfinal.jpg
Type: image/jpeg
Size: 3698 bytes
Desc: not available
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20240205/22c2c61d/attachment.jpg>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Screenshot 2023-10-19 at 12.17.20 PM.png
Type: image/png
Size: 12482 bytes
Desc: not available
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20240205/22c2c61d/attachment-0001.png>