[labnetwork] Turbo pump PlasmaTherm 720 etcher

[Philipp Altpeter]

Dear Roman,

If you unmount the turbopump from the chamber and rotate the body of the pump, the rotors are not suppose to follow this movement. Otherwise there is something wrong with the bearings. If the pump looks OK mechanically, then the power supply is probably broken. There is not much to repair, and the manufacturer would probably either sell a new power supply or a refurbished power supply in return of the broken one.

Hope it helps.

Philipp
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