[labnetwork] Turbo pump PlasmaTherm 720 etcher

[Ryan Rivers]

Hi All,

I'll put in a plug for our local repair shop in the SF Bay Area. Don't be
fooled by the barebones website, Alex has been resolving our turbo repairs
for years.

http://www.sertecturboinc.com/

-Ryan

On Mon, Feb 5, 2024 at 1:49 PM Philipp Altpeter <philipp.altpeter at lmu.de>
wrote:

> Dear Roman,
>
> If you unmount the turbopump from the chamber and rotate the body of the
> pump, the rotors are not suppose to follow this movement. Otherwise there
> is something wrong with the bearings. If the pump looks OK mechanically,
> then the power supply is probably broken. There is not much to repair, and
> the manufacturer would probably either sell a new power supply or a
> refurbished power supply in return of the broken one.
>
> Hope it helps.
>
> Philipp
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20240205/2de076ba/attachment.html>