[labnetwork] Turbo pump PlasmaTherm 720 etcher

[Jeffrey Salzmann]

Roman,

I've used Massvac a few times and I've been quite happy with their work. You might want to have them send you a shipping box.

Regards,
Jeff


Jeff Salzmann
Assistant Professor of Research
Cleanroom Manager, Shared Instrumentation Laboratories
School of Engineering and Applied Sciences
University at Buffalo
114A Davis Hall
Buffalo, NY 14260

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Roman Akhmechet
Sent: Monday, February 5, 2024 9:08 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher

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Hello,
Recently our Leybold turbo pump on an old PlasmaTherm 720 RIE tool has stopped spinning. The controller for the pump seems to be communicating, but the load stays low when trying to start the pump for about 10 minutes before going into failure, probably due to a time out. I'm wondering if anyone has a recommended vendor to repair turbo pumps, or advice on what other issue may be causing this. Thank you.

Roman Akhmechet
Princeton University
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