[labnetwork] Turbo pump PlasmaTherm 720 etcher

[Kyle Keenan]

https://www.provac.com/

On Mon, Feb 5, 2024 at 11:41 AM Roman Akhmechet <romana at princeton.edu>
wrote:

> Hello,
>
> Recently our Leybold turbo pump on an old PlasmaTherm 720 RIE tool has
> stopped spinning. The controller for the pump seems to be communicating,
> but the load stays low when trying to start the pump for about 10 minutes
> before going into failure, probably due to a time out. I’m wondering if
> anyone has a recommended vendor to repair turbo pumps, or advice on what
> other issue may be causing this. Thank you.
>
>
>
> Roman Akhmechet
>
> Princeton University
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>


-- 
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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