[labnetwork] FSM 500TC Documentation

[William Hyland]

Labnetwork,

Our facility has a Frontier Semiconductor FSM 500 TC that we recently got working again. We would like to run some calibrations, but we lack any of the manuals or documentation for this tool. Does anybody happen to have a copy of the manual and/or service manual for this tool? Thank you in advance for your support.

Best Regards,
Will

Will Hyland
Associate Process & Equipment Engineer

Pritzker Nanofabrication Facility
The University of Chicago
Eckhardt Research Center
5640 S. Ellis Ave., Room LL180
Chicago, IL  60637

773.834.4978 office

whyland at uchicago.edu<mailto:whyland at uchicago.edu>  |  pme.uchicago.edu<http://pme.uchicago.edu/>


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