[labnetwork] Forming gas: 5% or 10% hydrogen

Beaudoin, Mario beaudoin at physics.ubc.ca
Tue Feb 27 15:27:26 EST 2024


Dear Network,

We're setting up a new RTA and will run it with Ar, N2 and forming gas.  
We're uncertain about the % level of hydrogen we want in our forming 
gas.  Can someone recomment the best hydrogen % to use for MOS capacitor 
annealing?

Regards,

Mario

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