[labnetwork] Forming gas: 5% or 10% hydrogen
Beaudoin, Mario
beaudoin at physics.ubc.ca
Tue Feb 27 15:27:26 EST 2024
Dear Network,
We're setting up a new RTA and will run it with Ar, N2 and forming gas.
We're uncertain about the % level of hydrogen we want in our forming
gas. Can someone recomment the best hydrogen % to use for MOS capacitor
annealing?
Regards,
Mario
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