[labnetwork] OXford Plasmalab System 100 (ICP-RIE) - PCB BOARD ISSUE

[Christophe Clément]

Small edit of my previous message: Oxford has solved today our issue. As
our tool is old (bought in 2002), the tool is not anymore listed in their
inventory.

Bill of material was hard to find for them for such old tool. Finally, we
will receive in few days a fully completed PCB assembly!



Thanks you for all your answer, Phillip, Justin, Denis, Tobi, Julia. I
appreciate you help. And thank you Labnetwork.



Best

Chris



Christophe Clément

Technicien laboratoire

Laboratoire de microfabrication (LMF)

Groupe des Couches Minces (GCM) www.gcmlab.ca <http://www.gcmlab.ca/>

Ecole Polytechnique de Montréal  <http://www.polymtl.ca/> www.polymtl.ca

Département de génie physique

* 2900 Boulevard Edouard Monpetit

Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4


*  <mailto:christophe.clement at polymtl.ca> christophe.clement at polymtl.ca

* 514 340 4711 #2417

Fax : 514 340 5195





De : labnetwork <labnetwork-bounces at mtl.mit.edu> De la part de Christophe
Clément
Envoyé : 19 mars 2024 09:03
À : labnetwork at mtl.mit.edu
Objet : [labnetwork] OXford Plasmalab System 100 (ICP-RIE) - PCB BOARD
ISSUE



Hello community



We recently had a water leak on our ICP-RIE Plasmalab System100 (an
ICP-RIE). Water went on the main PCB board without touching the X20 PLC by
chance.

We could not have +24 +15 and -15VDC on screen to restart all pumps. After
some work on the PCB board we could find a faulty resistor and could
finally restart the pumping, but still some issues were still present (no
CM Gauge reading on the software, and some heaters at max temperature).

After some step forwards, we did step backwards because now we have lost
the communication between PC and PLC.



We have then decided to ask Oxford for a PCB replacement (94-PC91S21083
REV 3), but what we received is not what we were expecting (I did not know
if I had to laugh or cry when opening the box
)



Left: what we need, right: what we received from Oxford.





If some Oxford tool owners, or any refurbished equipment’s company, or any
third party company that works with Oxford tools read this message and
know where we can buy a refurbished 94-PC91S21083 REV 3 PCB board or offer
any advice, that will be greatly appreciated!



Thank you

Christophe



Christophe Clément

Professionnel de recherche

Laboratoire de microfabrication (LMF)

Groupe des Couches Minces (GCM) www.gcmlab.ca <http://www.gcmlab.ca/>

Ecole Polytechnique de Montréal  <http://www.polymtl.ca/> www.polymtl.ca

Département de génie physique

* 2900 Boulevard Edouard Monpetit

Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4


*  <mailto:christophe.clement at polymtl.ca> christophe.clement at polymtl.ca

* 514 340 4711 #2417

Fax : 514 340 5195







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