[labnetwork] OXford Plasmalab System 100 (ICP-RIE) - PCB BOARD ISSUE

[Moreau, Justin]

Hi Christophe

94-PC91S21083 is the PN for the unpopulated card.   You need the assembled card. The PN looks like it should be 94-MA91Z21084

I suggest calling Oxford they may have one.












<https://www.linkedin.com/company/umass-lowell-core-research-facilities/>[University of Massachusetts Lowell]
Justin Moreau
Director, Nanofabrication Core
CORE RESEARCH FACILITIES
ETIC
E: Justin_Moreau at uml.edu<mailto:Justin_Moreau at uml.edu>
T: 978-934-3615   M: 978-337-8148

[cid:image004.jpg at 01DA79F4.591E4CB0]<https://www.linkedin.com/company/umass-lowell-core-research-facilities/>

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Christophe Clément
Sent: Tuesday, March 19, 2024 9:03 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] OXford Plasmalab System 100 (ICP-RIE) - PCB BOARD ISSUE

Hello community We recently had a water leak on our ICP-RIE Plasmalab System100 (an ICP-RIE). Water went on the main PCB board without touching the X20 PLC by chance. We could not have +24 +15 and -15VDC on screen to restart all pumps. After
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Hello community

We recently had a water leak on our ICP-RIE Plasmalab System100 (an ICP-RIE). Water went on the main PCB board without touching the X20 PLC by chance.
We could not have +24 +15 and -15VDC on screen to restart all pumps. After some work on the PCB board we could find a faulty resistor and could finally restart the pumping, but still some issues were still present (no CM Gauge reading on the software, and some heaters at max temperature).
After some step forwards, we did step backwards because now we have lost the communication between PC and PLC.

We have then decided to ask Oxford for a PCB replacement (94-PC91S21083 REV 3), but what we received is not what we were expecting (I did not know if I had to laugh or cry when opening the box…)

Left: what we need, right: what we received from Oxford.
[cid:image005.jpg at 01DA79F4.591E4CB0][cid:image006.jpg at 01DA79F4.591E4CB0]

If some Oxford tool owners, or any refurbished equipment’s company, or any third party company that works with Oxford tools read this message and know where we can buy a refurbished 94-PC91S21083 REV 3 PCB board or offer any advice, that will be greatly appreciated!

Thank you
Christophe

Christophe Clément
Professionnel de recherche
Laboratoire de microfabrication (LMF)
Groupe des Couches Minces (GCM) www.gcmlab.ca<https://urldefense.com/v3/__http:/www.gcmlab.ca/__;!!NcNAlj2UIVkjDA!-3sDhRSuAp3ECSOiNFfvntMM8wJpS2zyXb2UwLC00RML9kdLaXCqtMoJ8TkNS8wUeGgYy5mLW02_seKx3BWKSTSu_xcxxNQTUrg$>
Ecole Polytechnique de Montréal www.polymtl.ca<https://urldefense.com/v3/__http:/www.polymtl.ca/__;!!NcNAlj2UIVkjDA!-3sDhRSuAp3ECSOiNFfvntMM8wJpS2zyXb2UwLC00RML9kdLaXCqtMoJ8TkNS8wUeGgYy5mLW02_seKx3BWKSTSu_xcx3K5nP-k$>
Département de génie physique
• 2900 Boulevard Edouard Monpetit
Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4

• christophe.clement at polymtl.ca<mailto:christophe.clement at polymtl.ca>
• 514 340 4711 #2417
Fax : 514 340 5195



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