[labnetwork] Thermal conductivity in plasma chamber

[Daniel Lloyd]

Hi all,

I currently use a vacuum grease to promote thermal conductivity in a RIE chamber but unfortunately it seems to react badly with fused silica (SiO2). This results in a dirty film being left on the surface of the substrate which is very hard (verging on impossible) to remove). Can anyone suggest a replacement which won't cause this problem?

Thanks,

Daniel