[labnetwork] who cleans your cleanroom?

Tue Mar 6 06:20:13 EST 2012

Hi,

Here at Draper we have technicians that are assigned to keep the areas that they work in clean, that means a weekly wipe of all horizontal surfaces and remove the clutter. We have a facility technician that vacuums and washes the floor once per week.

We do one big clean per year and per the ISO requirements the room is tested one time per year for HEPA integrity. The facility technician does a monthly particle check of all areas, we focus on the load/unload areas. We have several process technicians measure particles added/subtracted to wafers after a simulated process run on all of our tools. If this test fails, then we check the room particles in that area and adjust the cleaning if needed.

We use HEPA vacuum cleaners, back-pack type and the floor model type.

Regards
Rick

Rick Morrison
Senior Member Technical  Staff 
Group Leader Microfabrication Operations
Draper Laboratory
555 Technology Square
Cambridge, MA  02139

W  617-258-3420
C   508-930-3461

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu
Sent: Monday, March 05, 2012 1:11 PM
To: Fab Network
Subject: [labnetwork] who cleans your cleanroom?

Dear Fab Network,

I am working on a cleaning plan for Penn's new cleanroom (about 10,000 
sqft of class 100 and 1,000) and I am writing to ask for your help:
- Who does the cleaning for you: fab staff, central Facilities, external 
contractor, etc?
- How many times a day is your Facility cleaned?
- How often are the walls cleaned?
- How many "general cleanings" do you have throughout the year?  Who 
does it?
- Do you use anything else besides DI water/IPA to mop the floors?
- If you do not have central vacuum, what vacuum cleaners have you had 
good experiences with?
- What precautions should one take when cleaning raised floors?

Thank you very much for your help.

Iulian
-- 
iulian Codreanu, Ph.D.
Director, Penn NanoFab
200 South 33rd Street
Room 376 GRW Bldg
Philadelphia, PA 19104-6314
P: 215-898-9308
F: 215-573-2068
www.seas.upenn.edu/~nanofab

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