[labnetwork] How do you dispense photoresist?

[Garry J. Bordonaro]

We have something like 700-800 of those little bottles as each research
group keeps their own supply bottle.  The bottles are filled/refilled from 1
ltr. source bottles.  We teach them to wipe clean the top of the bottle with
acetone each time they pour from it.  How they deal with their own bottles
is up to them, but most of them get the idea.

 

We provide clean disposable plastic pipettes for dispensing.  If they are
careful they can avoid particulate issues, but keeping the bottle at least
half filled and staying away from the bottom with the pipette helps too.

 

 

Garry J. Bordonaro

Microlithographic Engineer

Cornell NanoScale Facility

Cornell University

250 Duffield Hall

Ithaca, NY  14853-2700

(607) 254-4936

 

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Andrew R. Lingley
Sent: Wednesday, September 26, 2012 12:18 PM
To: Michael Khbeis; labnetwork at mtl.mit.edu; ccgrot01 at louisville.edu
Subject: Re: [labnetwork] How do you dispense photoresist?

 

Hello all,

We had the same problem with resist drying on bottle cap threads.  Recently,
we have switched to 50 mL non-lubricated polypropylene syringes and have had
good results with a variety of resists.  They are a little expensive
(~$3/syringe), but we have found that they can be cleaned and reused.  Also,
although we haven't needed to yet, it seems that the plunger seal is tight
enough that we could probably filter the resist if we chose.  We decant
directly into the syringes, but as they do not block UV we store a dozen or
so in the fridge in aluminum foil that can be taken out as needed.  Users
have found this method to be very easy and reliable, and it seems that
particulate contamination is less of an issue.  Please email me if you would
like specifics about the syringes we use or our dispensing procedures.
Thanks.

Andy



On Tue, Sep 25, 2012 at 8:29 PM, Michael Khbeis <khbeis at uw.edu> wrote:

Andy,

 

You should respond with what you've been doing. 

Dr. Michael Khbeis

Associate Director

Microfabrication Facility (MFF)

University of Washington

Fluke Hall, Box 352143

(O) 206.543.5101

(C) 443.254.5192

khbeis at uw.edu

Sent from my iPhone


Begin forwarded message:

From: Caitlin Grothaus <ccgrot01 at louisville.edu>
Date: September 25, 2012, 10:50:10 AM PDT
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] How do you dispense photoresist?

Hello Everyone,

We're currently re-examining our current method of dispensing photoresist
onto wafers for spinning.  Currently we are decanting larger bottles into
small amber dropper bottles but have had some issues (mainly with resist
drying around the seal of the bottle and causing contamination).

 

What do you use at your lab?  If you do use amber dropper bottles, are there
any steps you take to try to prevent this contamination from happening?

 

Thanks!

Caitlin

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-- 
Dr. Andrew Lingley
Sr. Microfabrication Engineer
Microfabrication Facility (MFF)
Cell - (360)-870-8263 <tel:%28360%29-870-8263> 
alingley at uw.edu

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