[labnetwork] BCL3 - Gas Line Heaters and Protocols
Dean Sutter
ds120 at gatech.edu
Mon Aug 26 15:09:56 EDT 2013
Hello,
AT GT Nano we have a hard plumbed BCL3 line coming from a central gas
room, running several hundred feet into the sub fab eventually
connecting to the tools.
We have been internally debating the necessary protocols and physical
installations necessary to ensure a safe and properly functioning
delivery mechanism.
These discussions have included the elimination of the central approach,
replaced with a local gas cabinet and shorter runs since maintaining and
being able to monitor line heaters on a several hundred foot of line,
buried in plumbing up in the ceiling is our primary concern.
So, we are seeking a benchmark from existing facilities that use BCL3.
Anyone care to volunteer to explain their installation and
operating/safety protocols?
Thanks
--
Dean A. Sutter
Associate Director,
Research Operations and Industry Engagements
dean.sutter at ien.gatech.edu
404 894 3847 - Office
404 558 1844 - Cell
www.ien.gatech.edu
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