[labnetwork] Bosch etch foreline and pump powder residue question...

[Ian Harvey]

Dear Labnetwork colleagues,

We are installing a used STS DRIE tool acquired from the used tool market and used for Bosch-Si etch.  

We are unsettled by the large amount of white powder collected in the foreline and inside the large turbopump.  The turbo is becoming unbalanced as flakes come off, and we are getting ready to trade in the large maglev pump for a refurb, and clean the forelines.

Does anyone have experience with what the powder is (F-C-S-O / EDS analysis attached), its risks, and how to safely manage it during pump removal, packing and declaration for shipping?

Thanks!

Ian

********************************************
Ian R. Harvey, Ph.D.
Associate Director, Utah Nanofab 
 &
Micron Microscopy Core
2511 SMBB (USTAR)
University of Utah

801/585-6162 (voicemail)
801/581-5676 (lab main number)
www.nanofab.utah.edu



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