[labnetwork] Shared Chiller [for equipment cooling] Issues

[Morrison, Richard H., Jr.]

Hi,

We do the same thing here, 1 chiller runs 3 process tools. We have manifolds at each tool that set the flow and pressure going to each tool. You have to make sure that your system is balanced, in other words you need valves at each manifold to throttle the water flow so that each tool receives only the water it requires.

Hope this helps.

Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav
Sent: Monday, September 22, 2014 2:23 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Shared Chiller [for equipment cooling] Issues

Dear All,

We are facing chiller [for cooling water for equipment] issues, most likely flow issues, probably due to using same chiller for multiple equipment. Though chiller total cooling capacity is able to provide flow/pressure but in an shared equipment scenario, could there be issues. Suddenly some equipment, in use, trips, because of low flow of cooling water probably.

Did anybody faced these issues, are we diagnosing it correctly?

Thanks a lot.

--
Thanks,
Kamal Yadav
Sr. Process Technologist
IITBNF, EE Department, Annexe,
IIT Bombay, Powai
Mumbai 400076
Internal: 4435
Cell: 7506144798
Email: kamal.yadav at gmail.com<mailto:kamal.yadav at gmail.com>, kamalyadav at ee.iitb.ac.in<mailto:kamalyadav at ee.iitb.ac.in>
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