[labnetwork] SPTS (STS) Advanced Silicon Etcher

[Donal Jamieson]

Hi Scott,
     I have attached some scans of the schematics for the RF match on 
one of our SPS ICP DRIE systems - they may be similar enough to be of 
use. One issue we found was the ceramic bearing on the capacitors 
central shaft - on the end furthest from the motor - degraded over time 
and prevented the cap from moving freely and would eventually cause the 
cap to fail completely. Also the initial position (50%) of the 
capacitors has to be correct as they can be placed 180° out of alignment 
and the match will never tune correctly.

  - Donal Jamieson
Research Specialist
Microsystems Technology Laboratories

On 8/10/2015 3:33 PM, Scott Blondell wrote:
>
> Does anyone have schematics, prints or other maintenance docs 
> available for this tool?
>
> We’re having an RF tuning issue, with or without a plasma or RF 
> actually on. One of the variable tuning caps is smooth in both directions
>
> while the other cap seems to pulsate or move in steps in one 
> direction, while smooth in the other. Through the computer, we can 
> command
>
> the cap adjust motors to move between 0 and 99% of their travel, so 
> observing the problem doesn’t require the RF to be on.
>
> We’ve done some component and PCB swaps with no change. Has anyone 
> experienced this or have any ideas?
>
> Thanks!
>
> Scott P. Blondell
>
> Facilities Manager
>
> Rochester Institute of Technology
>
> Semiconductor & Microsystems Fabrication Laboratory 
> <http://www.smfl.rit.edu/>
>
> 82 Lomb Memorial Dr.
>
> Bldg. 17-2519
>
> Rochester, NY 14623
>
> 585 738-4073 c
>
> 585 475-2171 o
>
> 585 475-5041 f
>
> spb1699 at rit.edu <mailto:spb1699 at rit.edu>
>
> www.smfl.rit.edu <http://www.smfl.rit.edu>
>
> http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg
>
> 	
>
>
>
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