[labnetwork] High accuracy temperature probe and transmitter

[Volkan Ozguz]

Dear Julian
We have a similar equipment (EBPG5000plusES)  in our Class 100 clean room.
We have a nominal control of 0.25C using Siemens TE controllers. The
variation of the relative humidity of the EBL room is on average 45.19RH% ±
0.27RH%, and the variation of the temperature is on average 21.98 C ± 0.12
C(5-hour trend data). The equipment works fine down to 10 nm resolution.
Volkan



Volkan Özgüz
​Director​
Sabancı University
Nanotechnology Research and Application Center - SUNUM
Orhanlı, Tuzla, İstanbul 34956
Office: 90 216 483 9834
Fax: 90 216 483 9885
Email: vozguz at sabanciuniv.edu
Web: http://sunum.sabanciuniv.edu






On Tue, Jan 6, 2015 at 11:54 PM, Iulian Codreanu <codreanu at udel.edu> wrote:

> Dear Colleagues,
>
> I need your help to identify the make/model of a temperature probe and
> transmitter combination to achieve the following specs for the room that
> will house the e-beam writer (Vistec EBPG 5200):
> -Setpoint: 20 C
> -Stability: +/-0.25 C
> -Rate of change: <0.1 C/hr
>
> The engineer recommends a 0.04 C accuracy but the controls contractor
> cannot find such a thing.  They did find a RTD probe with Class 1/10 DIN
> accuracy from Omega that meets the spec; however, the accuracy of the
> transmitter that comes with the RTD is only 0.2 C.
>
> The transmitter must be able to provide an analog output to the BAS.
>
> Any controls-related words of wisdom would also be much appreciated.
>
> Thank you very much.
>
> Iulian
>
> --
> iulian Codreanu, Ph.D.
> Director of Operations, UD NanoFab
> 163 ISE Lab
> 221 Academy Street
> Newark, DE 19716
> 302-831-2784
> http://udnf.udel.edu
>
>
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