[labnetwork] Contamination control in PVD systems

[Carsen Kline]

Hello all,

We're looking to expand our PVD capabilities and we're curious to know how other labs control contamination as it relates to safety, process, and equipment condition. Can anyone share your general philosophy or policies on approaching contamination control in PVD systems? (For example, categorizing systems based on allowed contaminants, or having multiple levels of controlled access to specific tools, etc.)

Thanks for your input, I'm looking forward to your responses.

Carsen




Carsen Kline
Stanford Nanofabrication Facility
http://snf.stanford.edu
carsen at stanford.edu