[labnetwork] E-beam evaporator of Molybdenum Oxide

[Kolin Brown]

To all,

We have a request to add molybdenum oxide to our e-beam evaporator dedicated to oxide material deposition.  Currently we only deposit silicon oxide, aluminum oxide and ITO I our system.  Does anyone have any experience in e-beam evaporator of molybdenum oxide, or any information if the material may cause contamination problems?

/ Kolin S. Brown
Cleanroom Manager, Shared Research Facilities
West Virginia University
(304)293-9683
ksbrown at mail.wvu.edu
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