[labnetwork] SU-8 Thickness Uniformity

[John Sam Soon]

Hello
We've been running uniformity thickness tests of SU8-2025 on 4 in prime Si
wafers (measured with a mechanical profilometer), and have gotten results
around 13% (Max-Min/(Max+min)). Far from Microchem's reported 5%). I wanted
to reach out to the community as to:
1) What are some of the uniformity numbers that other users are getting? and
2) for those getting good uniformity, are there any process control tips
that can be shared?


-- 
Nicholas Sam-Soon
Microfabrication Process Engineer
Calit2 Qualcomm Institute
UC San Diego
http://nano3.calit2.net/
Email: jsamsoon at ucsd.edu
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