[labnetwork] SU-8 Thickness Uniformity

[Chito Kendrick]

Can you add how you are applying the SU-8 and does your calculation 
include the edge bead or are you using an edge bead remover.

I am also interested in this as I have a biochip company work in my lab 
that is try to get an edge bead free film without just cutting it off as 
they are losing to many devices in there mind. Currently, been looking 
at using a screen printer and also there was a paper on spraying edge 
bead remover on the SU-8 after spinning to get a edge bead free film.

Chito Kendrick


On 8/16/2017 3:55 PM, John Sam Soon wrote:
> Hello
> We've been running uniformity thickness tests of SU8-2025 on 4 in 
> prime Si wafers (measured with a mechanical profilometer), and have 
> gotten results around 13% (Max-Min/(Max+min)). Far from Microchem's 
> reported 5%). I wanted to reach out to the community as to:
> 1) What are some of the uniformity numbers that other users are 
> getting? and
> 2) for those getting good uniformity, are there any process control 
> tips that can be shared?
>
>
> -- 
> Nicholas Sam-Soon
> Microfabrication Process Engineer
> Calit2 Qualcomm Institute
> UC San Diego
> http://nano3.calit2.net/
> Email: jsamsoon at ucsd.edu <mailto:jsamsoon at ucsd.edu>
>
>
>
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-- 
Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>

Managing Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295

814-308-4255
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