[labnetwork] Sputter Ni/Cr (50/50 wt%)

[Jugessur, Aju S]

Hi all,

We will be trying to sputter Ni/Cr (50/50 wt%) on Alumina wafers and the thickness range will be between 30-50 nm. We are using the tool, Intlvac Nanochrome 1.
Since the material is magnetic, I was wondering if anyone would send us some suggestions on the process parameters to be used. There are several published reports on this but I wanted to check with
anyone who has some experience with this specific material.

Any comments/suggestions will be much appreciated.

Thanks
Aju



Aju Jugessur, Ph.D.
Director, University of Iowa Microfabrication Facility (UIMF)
Optical Science and Technology Center
Professor Adjunct, Physics and Astronomy
University of Iowa
Office: IATL 202, Tel: 319-3532342
Labs: IATL 170, 172, 174
https://ostc.uiowa.edu/uimf






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