[labnetwork] LiNbO3

[Fouad Karouta]

Dear all,

We have a user interested to sputter LiNbO3 in our AJA sputter system.
Looking at the SDS of LiNbO3 it shows some concerns of skin exposures to particles.
Has anyone experience sputtering LiNbO3 in a system where quite often we need to exchange targets and do you take any special measure when opening the chamber?
Also remarks on possible cross-contamination are welcome.

Thank you,
Fouad Karouta

*************************************
Manager ANFF ACT Node
Australian National Fabrication Facility
Research School of Physics and Engineering
L. Huxley Building (#56), Mills Road, Room 4.02
Australian National University
ACT 0200, Canberra, Australia
Tel: + 61 2 6125 7174
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Email: fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>
http://anff-act.anu.edu.au/

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