[labnetwork] ITO deposition

Wed Apr 10 09:29:03 EDT 2019

Hi Iulian,

We run an ITO deposition process in our loadlocked multi-user sputter tool, this was developed by one of our co-op students.  We have a number of different deposition processes available in this tool and no observed problems caused by the ITO process.  

As Brent Gila mentioned, the presence of O2 and H2O has an effect on the properties of the ITO films.  We noted that adding O2 in a reactive sputter process made the optical transmission better but also increased electrical resistivity.  We settled on a room temperature or mildly heated RF sputter deposition of the ITO (with only Ar gas), followed up by a brief anneal in our RTP in an O2 environment to get the best combination of transmission and electrical conductivity.  I would be happy to share our co-op's report offline if you would like a starting point for your process.

Best,
  -Nathan

-- 
Nathan Nelson-Fitzpatrick  PhD
Nanofabrication Process & Characterization Engineering Manager
Quantum-Nano Fabrication and Characterization Facility (QNFCF)
Office of Research
University of Waterloo
200 University Avenue West, Waterloo, ON  N2L 3G1
P: 519-888-4567 ext. 31796
C: 226-218-3206
https://fab.qnc.uwaterloo.ca

On 2019-04-09, 4:03 PM, "labnetwork-bounces at mtl.mit.edu on behalf of Iulian Codreanu" <labnetwork-bounces at mtl.mit.edu on behalf of codreanu at udel.edu> wrote:

    Dear Colleagues,

    We have received a number of requests to provide ITO deposition 
    capabilities. We have a sputterer but are concerned with the low melting 
    points for Indium and Tin.  I am under the impression that ITO needs a 
    dedicated deposition system. What is your experience/advice?

    Thank you,

    Iulian

    -- 
    iulian Codreanu, Ph.D.
    Director of Operations, Nanofabrication Facility
    University of Delaware
    Harker ISE Lab, Room 163
    221 Academy Street
    Newark, DE 19716
    302-831-2784
    http://udnf.udel.edu

    _______________________________________________
    labnetwork mailing list
    labnetwork at mtl.mit.edu
    https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork