[labnetwork] Ion Milling

Wed May 22 16:36:55 EDT 2019

Hi Tom,

At Harvard, we have an ion beam etcher.  What is the material to be etched?

Mac

Mac Hathaway
Senior Process and Systems Engineer
Harvard Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA  02138
617-495-9012

On 5/22/2019 11:46 AM, Ferraguto, Thomas S wrote:
Colleagues,

I have a customer that needs dry etch 18nm. We can’t use our ICP for the process. Does anyone have an Ion Mill Tool that could provide him the service.

Regards

Tom Ferraguto

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