[labnetwork] Floor Flat for EBeam Litho Tool

[Martin Euredjian]

Is the area of installation concave or convex?  If all the issues are
concavities then a suitable self-levelling compound (concrete, polymer or
epoxy) could be very simple solution.  If you have convex areas you have two
choices:  grind them down (likely not the best idea given the setting, yet
it is possible when done by someone with the appropriate experience, tools
and training) or use self levelling compounds to create a new flat plane
above the highest convex peak (i.e.:  a 1 inch thick pad on top of the
existing floor).  I've used this last approach many times for a range of
machine tools.

Depending on machine configuration, it could be as simple as using standard
wedge-type machine levelling pads:



https://www.mcmaster.com/6015K41



Here's a ESD conductive self levelling epoxy product.  You might want to
ping them for an opinion.  It would likely be a good idea to have a "depth
map" of the area to be treated before reaching out.

https://www.stonhard.com/products/stonlux/

 

 

    -Martin

 

From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On
Behalf Of Shivakumar Bhaskaran
Sent: Friday, June 12, 2020 2:22 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Floor Flat for EBeam Litho Tool

 

Hello All,

 

I hope everyone is safe and healthy.

 

Our Equipment engineer measured the floor flatness for the EBeam Lithography
tool, and we found that the floor is not flat as per the tool spec. We are
not sure whether the vinyl flooring was the issue or the concrete floor
underneath.  Below the tile, we have a static grid installed, cutting the
floor tile might risk the portion of the floor that will not be grounded, so
we are thinking of using sleeper plate to level the equipment.

 

Have anyone installed the EBeam Lithography tool on the Sleeper plate.
Please, let me know if you have any suggestions on how to level the
equipment.

 

The tool we are installing is EBPG5150; the equipment requirement for floor
tolerance is 1.5mm within the entire footprint of the EBPG system plinth.

 

Thanks,

Shiva

 

Shivakumar Bhaskaran, Ph.D., 

Associate Director, 

John D. O'Brien Nanofabrication Laboratory

Michelson Hall, 1002 Childs Way, MCB LL121,

Los Angeles, California 90089, 213 821 2374



 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20200613/d3082d20/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image001.jpg
Type: image/jpeg
Size: 2109 bytes
Desc: not available
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20200613/d3082d20/attachment.jpg>