[labnetwork] Toxic gas delivery for small fabs?

[Collins, Deon]

The first things you want to find out are the local, state, and federal code on these materials. Being a new fabrication, you will most likely have to abide by the most up to date codes and their revisions.   As Holonyak Lab was design and built in the late 80's the way I manage HPM's may be very different from your requirements.

We have 2 toxic gas vaults with gas cabinets for delivery We use Ps-7's(electrochromic sensors) and CL-96(Hydride tape) for gas monitoring.

In our case H2 is delivered from a tube trailer. Every and all piping is coaxial as well as orbital welded up until it is distributed in the chase to our clean rooms. From there we rely in VCR connections and H2 monitoring for leaks 24/7.

Our current CL2, BCL3 delivery system is being replaced by new cabinets from CSI. We had elected to install these cabinets in our toxic gas vaults but may need to pivot due to the length of the delivery path.

As far as abatement, HMNTL used to run outdated and unreliable CDO's. We are pivoting to a water scrubber just for the etching tools. This what has been recommended for our etch tools but depending on the material you are processing you may need another type of abatement device. I might add we run our exhaust through a second large scrubber as that is the exhaust source for toxic sources.

Again, I would suggest researching your specific codes before jumping to conclusions. Semi Standards is good place to start.
Deon D. Collins

FACILITY MANAGER
The Grainger College Of Engineering UIUC
Holonyak Micro & Nanotechnology Lab
208 N Wright St Rm. 1114 | MC-249
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>


[cid:image001.png at 01DA268B.C6B87D20]<http://illinois.edu/>

Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.

Life is not about watching other people live it. It's about you living your own!

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Russell Renzas
Sent: Monday, December 4, 2023 12:52 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Toxic gas delivery for small fabs?

Hi, I'm Russ, some of you know me from Oxford Instruments - I just left to direct a new 3k sqft academic fab at University of Nevada Reno.

How do the smaller university fabs handle toxic gas delivery? e.g. Cl2, BCl3, H2... Any recommendations for systems/vendors? And do you generally keep cylinders for that in an external bunker-type place, or nearer point of use (in a service chase)?  SF6 and the like don't need anything special, correct?

Also is it now typical to abate fluorinated etch gases which I thought requires expensive burn boxes, or do the dry bed systems suffice?

Bit embarrassed that I don't know this stuff better, but I never had to think about it before.

Happy holidays,

Russ

Russ Renzas
University of Nevada, Reno
Google Scholar<https://urldefense.com/v3/__https:/scholar.google.com/citations?user=_4TTYQoAAAAJ&hl=en__;!!DZ3fjg!5aCbDmIv33CphunBz3V3yvuq_TggWVUpprOtA8kPw3GsfMfdjoy4ZnAhBoPZZhIV6uYnlux1Fo5jNqPeB4Ft$>, LinkedIn<https://urldefense.com/v3/__https:/www.linkedin.com/in/renzas__;!!DZ3fjg!5aCbDmIv33CphunBz3V3yvuq_TggWVUpprOtA8kPw3GsfMfdjoy4ZnAhBoPZZhIV6uYnlux1Fo5jNiPr8YHR$>

- My position at UNR starts in mid-January 2024. -
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20231204/6b302847/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image001.png
Type: image/png
Size: 2602 bytes
Desc: image001.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20231204/6b302847/attachment.png>