[labnetwork] Toxic gas delivery for small fabs?

[Kyle Keenan]

I'd recommend Applied Energy Systems gas cabinets and VMB's.

On Mon, Dec 4, 2023 at 8:11 AM Russell Renzas <rrenzas at unr.edu> wrote:

> Hi, I'm Russ, some of you know me from Oxford Instruments - I just left to
> direct a new 3k sqft academic fab at University of Nevada Reno.
>
> How do the smaller university fabs handle toxic gas delivery? e.g. Cl2,
> BCl3, H2... Any recommendations for systems/vendors? And do you generally
> keep cylinders for that in an external bunker-type place, or nearer point
> of use (in a service chase)?  SF6 and the like don't need anything special,
> correct?
>
> Also is it now typical to abate fluorinated etch gases which I thought
> requires expensive burn boxes, or do the dry bed systems suffice?
>
> Bit embarrassed that I don't know this stuff better, but I never had to
> think about it before.
>
> Happy holidays,
>
> Russ
>
> Russ Renzas
> University of Nevada, Reno
> Google Scholar
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> LinkedIn
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>
> — My position at UNR starts in mid-January 2024. —
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-- 
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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