[labnetwork] Toxic gas delivery for small fabs?

[Iulian Codreanu]

Welcome Russ!

As some of our colleagues have/will mentioned/mention, it is best to 
work with your local folks such as EHS, fire marshal, and city code 
enforcers. At times you may have to educate them on certain topics. 
Gathering input from other places across the country as you are doing 
should be very helpful in your conversations.

At Delaware I have gas room for corrosives (placed in gas cabinets) and 
an inerts "farm". I also have a bunker that houses pyrophorics and 
flammables (also placed in gas cabinets). The BCl3 cabinet is located in 
the chase close to the tools that need it (there are very clever folks 
on this mailing list who know how to flow things like BCl3 across 
hundreds of feet). All corrosives, flammables, and toxics are 
transported to the tools via coaxial lines. I also have a toxic gas 
monitoring system with various levels of integration with the tools, the 
fire alarm system, and the the building management system.

The gas equipment provided by Applied Energy Systems seems to be very 
popular with the university cleanrooms and with good reason; I've been 
happy with their products for the past 16 years.

Abatement of fluorinated gases seems to also be a local code item and I 
do not have to abate them here.

Good luck!

Iulian


iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
https://udnf.udel.edu

On 12/4/2023 1:51 AM, Russell Renzas wrote:
> Hi, I'm Russ, some of you know me from Oxford Instruments - I just 
> left to direct a new 3k sqft academic fab at University of Nevada Reno.
>
> How do the smaller university fabs handle toxic gas delivery? e.g. 
> Cl2, BCl3, H2... Any recommendations for systems/vendors? And do you 
> generally keep cylinders for that in an external bunker-type place, or 
> nearer point of use (in a service chase)?  SF6 and the like don't need 
> anything special, correct?
>
> Also is it now typical to abate fluorinated etch gases which I thought 
> requires expensive burn boxes, or do the dry bed systems suffice?
>
> Bit embarrassed that I don't know this stuff better, but I never had 
> to think about it before.
>
> Happy holidays,
>
> Russ
>
> Russ Renzas
> University of Nevada, Reno
> Google Scholar 
> <https://scholar.google.com/citations?user=_4TTYQoAAAAJ&hl=en>, 
> LinkedIn <https://www.linkedin.com/in/renzas>
>
> — My position at UNR starts in mid-January 2024. —
>
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