[labnetwork] High temp (1700C) anneal capability

Robert Pearson repemc at rit.edu
Fri Dec 15 11:48:57 EST 2023


I have a senior undergraduate who is fabricating silicon carbide Schottky Barrier Diodes.

We are sending the wafers out for guard ring implants (aluminum) but do not have a suitable high temperature anneal furnace (>1600C).

I would like to hear from anyone who has this capability to see what sort of arrangements we can make.

Sincerely,

Rob


Robert E. Pearson, PhD.
Rochester Institute of Technology
Electrical and Microelectronic Engineering
Kate Gleason College of Engineering
585 475-2923
Robert.pearson at rit.edu

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