[labnetwork] Sparkles in the PECVD deposited amorphous silicon film

[Jeremy Clark]

Hi Vibhor,


You should look under a microscope but these look like bubbles- either 
from poor adhesion or too much Hydrogen in the film (or both).


How did you clean your sample before deposition?

What is the underlying material, and is it possible it has changed?

Is possible that some part of the tool was changed recently?


Regards,

Jeremy Clark

Cornell Nanoscale Facility


On 7/24/23 13:12, Vibhor Kumar wrote:
> Dear labnetwork community,
> We are trying to deposit a-si (~100 nm) with plasmatherm PECVD. We are 
> using 10% silane. Our recipe worked fine in the past. But this time we 
> started looking some "sparkles" in the deposited film (image 
> attached). We cleaned the chamber with freon gas, but still the 
> situation is the same.
>
> Any suggestion/s will be highly appreciated.
>
> Sincerely,
> -Vibhor Kumar-
> Research Associate,
> School of Engineering,
> Rutgers, The State University of New Jersey, NJ
> USA.
>
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